SEC-Z514M 流量控制器

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Z514, Z524 DevicenetTM

Mass Flow Controller / Meter

Mass flow controller model *1 SEC-Z514KX SEC-Z514MGX SEC-Z524MGXN SEC-Z524MGX

Mass flow meter model *1 SEF-Z514KX SEF-Z514MGX SEF-Z524MGXN SEF-Z524MGX

Full-scale flow rate MR/MG number

(N2 conversion flow rate) #R01:10SCCM

#R1.5:17.5SCCM

#01:30SCCM

#1.5:55SCCM

#02:100SCCM

#2.5:175SCCM

#03:300SCCM

#3.5:550SCCM

#04:1SLM

#4.5:1.75SLM

#05:3SLM

#5.5:5.5SLM

#06:10SLM

Valve Type

Flow rate at fully closed control valve

Flow rate control range

Flow rate measuring range (SEF)

Operating temperature

Response

Linearity

Repeatability

50 to 300 kPa (d)

#5.5, #06: 100 to 300 kPa (d)

Operating differential pressure (SEF)

MAX. Operating pressure

Pressure resistance

Leak Integrity

Digital interface

Wetted materials

Power supply

1/4 inch VCR equivalent

Option: 1.125 inch IGS

Mounting orientation

*1 The gas type and full scale settings for the SEC(SEF)-Z514MGX and Z524MGXN can be changed by

the operator, using special software.

*2 The flow rate precision guaranteed temperatures conform to SEMI E56-1296 standards. The precision is that

associated with the full-scale MR and MG number values.

*3 IGS: Integrated Gas System

* SCCM and SLM are notations indicating the gas flow rate (mL/min, L/min, at 0°C and 101.3 kPa).

≤ 2% F.S.

2-100% of F.S.

0-100% of F.S.

≤ 1 second: Over full flow rate range

≤ ±0.5% F.S.

≤ ±0.2% F.S.

±0.25% F.S. (Flow rate ≤ 25% F.S.)

Conforming to ODVA standards, DC 24 V, 4.0 VA

450kPa(g)

Operating differential pressure 50 to 300 kPa (d) 200 to 300 kPa (d)

≤ 300 kPa (d)

1000kPa(g)

≤ 5 x 10-12Pa·m3/s (He)

DeviceNet™ Protocol

316L Stainless Steel (polished surface)

Standard Fitting *3 1/4 inch VCR equivalent 1.5 inch IGS

Free

Option: 1.125 inch IGS, 1.5 inch IGS

1/2SCCM

MR/MG number

O: Normally open C: Normally closed

#6.5:22SLM

#07:30SLM

#08:50SLM

Accuracy *2 ±1.0%F.S. ±1.0% S.P. (Flow rate > 25% F.S.)

5 to 50°C (recommended temperature range: 15 to 45°C)

Z514/524 Web Ver.001

Subject to change without notice.