SEC-Z512MGX 流量控制器

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Z512, Z522 Digital / Analog

Mass Flow Controller / Meter

SEC-Z512MGX SEC-Z522MGXN SEC-Z522MGX

SEC-Z512X SEC-Z522XN SEC-Z522X

SEF-Z512MGX SEF-Z522MGXN SEF-Z522MGX

SEF-Z512X SEF-Z522XN SEF-Z522X

Full-scale flow rate MR/MG number

(N2 conversion flow rate) #R01:10SCCM

#R1.5:17.5SCCM

#01:30SCCM

#1.5:55SCCM

#02:100SCCM

#2.5:175SCCM

#03:300SCCM

#3.5:550SCCM

#04:1SLM

#4.5:1.75SLM

#05:3SLM

#5.5:5.5SLM

#06:10SLM

Valve Type

Flow rate at fully closed control valve

Flow rate control range

Flow rate measuring range (SEF)

Operating temperature

Response

Linearity

Repeatability

50 to 300 kPa (d)

#5.5, #06: 100 to 300 kPa (d)

Operating differential pressure (SEF)

MAX. Operating pressure

Pressure resistance

Leak Integrity

Flow rate setting signal

Flow rate output signal

Wetted materials

1/4 inch VCR equivalent

Option: 1.125 inch IGS

Mounting orientation

*1 The gas type and full scale settings for the SEC(SEF)-Z512MGX, Z522MGX, and Z522MGXN can be changed

by the operator, using special software.

*2 The flow rate precision guaranteed temperatures conform to SEMI E56-1296 standards. The precision is that

associated with the full-scale MR and MG number values.

*3 IGS: Integrated Gas System

* SCCM and SLM are notations indicating the gas flow rate (mL/min, L/min, at 0°C and 101.3 kPa).

Mass flow controller model *1 SEC-Z512KX

Mass flow meter model *1 SEF-Z512KX

O: Normally open C: Normally closed

≤ 2% F.S.

2-100% of F.S.

1/2SCCM

MR/MG number

#6.5: 22SLM

#07: 30SLM

#08: 50SLM

0-100% of F.S.

Accuracy *2 ±1.0%F.S. ±1.0%S.P.(Flow rate>25%F.S.)

±0.25%F.S.(Flow rate≤25%F.S.)

5 to 50°C (recommended temperature range: 15 to 45°C)

≤ 1 second: Over full flow rate range

≤ ±0.5% F.S.

≤ ±0.2% F.S.

Operating differential pressure 50 to 300 kPa (d) 200 to 300 kPa (d)

≤ 300 kPa (d)

450 kPa (g)

1000 kPa (g)

≤ 5 x 10-12 Pa·m3/s (He)

0.1 to 5 V DC (2% to F.S.); Input impedance 1 MÙ or higher

0 to 5 V DC (0% to F.S.); Minimum load resistance 2 kÙ or higher

Digital interface

With address function: RS-485 (transmission speed 38,400 bps)

F-Net Protocol

316L Stainless Steel (polished surface)

Power supply

+15V±5% 150mA

-15V±5% 150mA

Signal response

Analog: D-Sub 9-pin (TOP)

Digital: 2 LAN jacks (TOP)

Standard Fitting *3

1/4 inch VCR equivalent

Option: 1.125 inch IGS, 1.5 inch IGS

1.5 inch IGS

Free

Z512/522 Web Ver.001

Subject to change without notice.